Reaction Kinetics in GeO2/Ge System
Ge is a promising candidate to replace Si for future CMOS because of its high mobility. However, the kinetic study on GeO2/Ge is still insufficient to meet the requirement for the control of GeO2/Ge stack. In this book, the kinetics in GeO desorption, GeO2 crystallization and Ge oxidation in GeO2/Ge system are systematically investigated.
- First Edition
- PDF eBook
- 5x8, 232 pages